Method for manufacturing a printed wiring board

ABSTRACT

A method for manufacturing a printed wiring board having a bump. The method includes forming a solder-resist layer having a small-diameter aperture and a large-diameter aperture, each aperture exposing a respective conductive pad of the printed wiring board, and printing a solder paste in the large-diameter aperture in the solder-resist layer, but not printing the solder paste in the small-diameter aperture in the solder resist layer. The method also includes loading a solder ball in each of the large-diameter aperture and the small-diameter aperture using a mask having aperture areas that correspond to the small-diameter aperture and large-diameter aperture of the solder-resist layer, and forming a small-diameter bump from the solder ball in the small-diameter aperture and a large-diameter bump from both the solder paste and the solder ball in the large-diameter aperture.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of PCT/JP06/325407, filed Dec. 20,2006, which claims priority to Japanese patent application No.2005-366485, filed Dec. 20, 2005, the entire contents of each of whichis incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method for manufacturing a printedwiring board, and more specifically relates to a method formanufacturing a printed wiring board that is preferably used for apackage substrate for mounting an IC chip.

2. Discussion of the Background

A solder bump is used for electrically wiring a package substrate and anIC chip. The solder bump is formed through the following processes:

(1) A process to print flux on a joint pad formed on the packagesubstrate.

(2) A process to mount a solder ball on the joint pad upon which flux isprinted.

(3) A process to form a solder bump from the solder ball by reflowing.

After forming the solder bump on the package substrate, the IC chip isplaced on the solder bump, the solder bump and the pad (terminal) of theIC chip are joined together by reflowing, and the IC chip is mounted onthe package substrate. In the abovementioned processes to mount a solderball on a joint pad, a print technology is used, for example byconcomitantly using a mask for aligning a ball and a squeegee as shownin Japanese Unexamined Patent Application Publication No. 2001-267731

SUMMARY OF THE INVENTION

The present invention broadly comprises a method for manufacturing aprinted wiring board having a bump. The method includes forming asolder-resist layer having a small-diameter aperture and alarge-diameter aperture, each aperture exposing a respective conductivepad of the printed wiring board, and printing a solder paste in thelarge-diameter aperture in the solder-resist layer, but not printing thesolder paste in the small-diameter aperture in the solder resist layer.The method also includes loading a solder ball in each of thelarge-diameter aperture and the small-diameter aperture using a maskhaving aperture areas that correspond to the small-diameter aperture andlarge-diameter aperture of the solder-resist layer, and forming asmall-diameter bump from the solder ball in the small-diameter apertureand a large-diameter bump from both the solder paste and the solder ballin the large-diameter aperture.

BRIEF DESCRIPTION OF THE DRAWINGS

A more complete appreciation of the invention and many of the attendantadvantages thereof will be readily obtained as the same becomes betterunderstood by reference to the following detailed description whenconsidered in connection with the accompanying drawings, wherein:

FIG. 1 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 2 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 3 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 4 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 5 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 6 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 7 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 8 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 9 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 10 is a cross-sectional view of a multilayered printed wiring boardrelated to an embodiment of the present invention.

FIG. 11 is a cross-sectional view of a state in which an IC chip isplaced on the multilayered printed wiring board in FIG. 10.

FIG. 12 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 13 is a flowchart showing a method for manufacturing a multilayeredprinted wiring board according to an embodiment of the presentinvention.

FIG. 14 (A) shows the framework of a device for mounting a solder ballrelated to the Embodiments of the present invention, and FIG. 14 (B)shows the view from arrow B of the device for mounting a solder ball inFIG. 14 (A) according to an embodiment of the present invention.

DETAILED DESCRIPTION OF EMBODIMENTS

Because a small-diameter solder ball can become smaller than a sandgrain, for example, in the method for concomitantly using a mask foraligning a ball and a squeegee as in JP 2001-267731, the solder ball isdeformed by the squeegee and the height of the solder bump can vary,resulting in quality and reliability deterioration of the end device.For example, when a solder ball becomes smaller, the ratio of the weightto the surface area decreases and an adsorptive phenomenon occurs to thesolder ball due to the intermolecular force. In the prior art, because asolder ball that aggregates easily comes in contact with a squeegee, thesolder ball is damaged and partially defected. If the solder ball ispartially defected, the volume of the solder bump becomes different oneach joint pad and the height of the solder bump varies as mentionedabove.

One of the objectives of the present invention is to provide a methodfor manufacturing a printed wiring board to form bumps of approximatelythe same height on joint pads with differing aperture diameters ofsolder masks (a semiconductor circuit in which sizes exposed from asolder-mask layer each differ).

One embodiment of the invention includes a method for manufacturing aprinted wiring board with a bump, including at least the following (a)to (d) steps:

-   -   (a) a process to form a solder-resist layer having a        small-diameter aperture and a large-diameter aperture so as to        expose a joint pad;    -   (b) a process to print a low-melting metal ball in a paste form        to a large-diameter aperture in said solder-resist layer;    -   (c) a process to mount a low-melting metal ball in said        large-diameter aperture and small-diameter aperture by using a        mask comprising aperture areas that correspond to the        abovementioned small-diameter aperture and large-diameter        aperture on the solder-resist layer; and    -   (d) a process to form a small-diameter bump from the        abovementioned low-melting metal ball of the small-diameter        aperture and a large-diameter bump from the low-melting metal in        a paste form and the low-melting metal ball of the        abovementioned large-diameter aperture by reflowing.

In one embodiment, a low-melting metal in a paste form is printed on alarge-diameter aperture of a solder-resist layer. Then, the low-meltingmetal ball is mounted on the large-diameter aperture and thesmall-diameter aperture of the solder-resist layer by using a mask.Because a small-diameter bump is formed from the low-melting metal ballat the small-diameter aperture of the solder-resist layer and alarge-diameter bump is formed from either the low-melting metal in apaste form or the low-melting metal ball at the large-diameter apertureof the solder-resist layer by reflowing, even if the diameters of thesolder-resist apertures to expose joint pads differ, the small-diameterbump and the large-diameter bump can be formed at approximately the sameheight. Consequently, when an IC chip is mounted through thesmall-diameter bump and large-diameter bump, it is possible to securejoint reliability between the IC chip and a printed wiring board.

In one embodiment, after reflowing the low-melting metal in a paste formin the large-diameter aperture of the solder-resist layer, thelow-melting metal balls are mounted on the small-diameter aperture andlarge-diameter aperture of the solder-resist layer by using a mask.Because the mask is not mispositioned even if the mask comes intocontact with the low-melting metal in the large-diameter aperture, themask can be positioned proximately to the solder-resist layer and thelow-melting metal ball can be mounted appropriately on the aperture ofthe solder-resist layer, resulting in avoiding or reducing a chance ofmispositioning or missing a bump.

In another embodiment, because a flux is applied before mounting alow-melting metal ball on the small-diameter aperture and large-diameteraperture of the solder-resist layer by using a mask, the low-meltingmetal ball can be mounted easily and the once-mounted low-melting metalball cannot be easily mispositioned.

In still another embodiment, because a flux is applied before printing alow-melting metal in a paste form on the large-diameter aperture of thesolder-resist layer, it is not required for applying the flux beforemounting the low-melting metal ball. In other words, after printing thelow-melting metal in a paste form, low-melting metal balls are mountedon the flux of the small-diameter aperture of the solder-resist layerand on the low-melting metal in a paste form of the large-diameteraperture and said low-melting metal in a paste form and low-meltingmetal ball can be reflowed at the same time. Reducing the time neededfor reflowing can avoid decreases to reliability caused by thermalhistory.

In yet another embodiment, a cylinder member is positioned on the upperside of the mask, low-melting metal balls are aggregated by intaking airfrom an aperture area of the cylinder member, the aggregated low-meltingmetal balls are moved by moving the cylinder member horizontally, andthe low-melting metal balls are dropped into the small-diameter apertureand the large-diameter aperture of the solder-resist layer through anaperture area of the mask. Consequently, fine low-melting metal ballscan be securely mounted on all, or essentially all, of the apertures ofthe solder-resist layer. Additionally, because the low-melting metalball is moved without contacting, unlike cases involving the use of asqueegee, it can be mounted on the small-diameter aperture and thelarge-diameter aperture without damaging the low-melting metal ball, andthe height of the bump can be made more uniform. Furthermore, even on anundulated printed wiring board (i.e. uneven surface) such as a build-upmultilayered wiring board, a low-melting metal ball can be placedappropriately through the aperture.

FIG. 14(A) shows the framework of a device for mounting a solder ballrelated to one example of the embodiments in the present invention, andFIG. 14 (B) shows the view from arrow B of the device for mounting asolder ball in FIG. 14 (A). For example, the device of FIGS. 14A and 14Bmay be used to mount a small solder ball 77 (less than 200 μm indiameter) on a joint pad of the multilayered printed wiring board.

A device for mounting a solder ball 100 comprises: a XYθ suction table114 that holds the positioning of a multilayered printed wiring board10, a vertically moving axis 112 that moves said XYθ suction table 114up and down, and a mask for aligning a ball 16, the mask comprising anaperture that corresponds to a joint pad of the multilayered printedwiring board. Also included is a mount cylinder (cylindrical member) 124that guides a solder ball moving on the mask for aligning a ball 16, asuction box 126 that provides negative pressure on the mount cylinder124, a cylinder for removing absorbed balls 161 to collect redundantsolder balls, and a suction box 166 that provides negative pressure onsaid cylinder for removing absorbed balls 161. Also included is asuction device for removing absorbed balls 168 that holds the collectedsolder balls, a mask clamp 144 that clamps the mask for aligning a ball16; and a moving axis in the X direction 140 that sends the mountcylinder 124 and the cylinder for removing absorbed balls 161 in an Xdirection. In one embodiment, the clamp 144 may be fixed to the table114 such that the mask moves with the table when the table is movable.Further included in the embodiment of FIGS. 14A and 14B is a supportguide for the moving axis 142 that supports the moving axis in an Xdirection 140, an alignment camera 146 that images a multilayeredprinted wiring board 10, a sensor for detecting remaining quantity 118that detects the remaining quantity of solder balls under the mountcylinder 124, and a feeding device for solder balls 122 that feedssolder balls to the mount cylinder 124 according to the remainingquantity detected by the sensor for detecting remaining quantity 118.

Next, with reference to FIG. 1 to FIG. 11, the constitution of themultilayered printed wiring board 10 related to embodiments of thepresent invention is explained. FIG. 10 shows a cross-sectional view ofsaid multilayered printed wiring board 10 and FIG. 11 shows the board ina state in which an IC chip 90 is mounted on the multilayered printedwiring board 10 in FIG. 10 and placed on a daughter board 94. As shownin FIG. 10, on the multilayered printed wiring board 10, a conductorcircuit 34 is formed on the surface of a core substrate 30. The frontand back surfaces of the core substrate 30 are jointed through athrough-hole 36. On the core substrate 30, an interlayer resininsulation layer 50 upon which a via-hole 60 and a conductor circuit 58are formed, and an interlayer resin insulation layer 150 on which avia-hole 160 and a conductor circuit 158 are formed are aligned. On theupper layer of said via-hole 160 and conductor circuit 158, asolder-mask layer 70 is formed. A large-diameter (D1=105 μm) aperture71P and a small-diameter (D2=80 μm) aperture 71S are formed on thesolder-mask layer 70, a large-diameter solder bump 78P for power andearth are aligned on the large-diameter aperture 71P, and asmall-diameter solder bump 78S for signals is mounted on thesmall-diameter aperture 71S. The height H1 of the large-diameter solderbump 78P is set approximately 30 μm and the height H2 of thesmall-diameter solder bump 78S is also set approximately 30 μm. Thelarge-diameter solder bump 78P for power and earth is aligned near thecenter of the multilayered printed wiring board so as to shorten thewiring distance, while the small-diameter solder bump 78S for signals isalighted relatively apart from the center. On the underside of themultilayered printed wiring board, a solder bump 78D is formed throughthe aperture 71 of said solder-mask layer 70. In addition, in FIG. 10,although an aperture of the solder mask is formed so as to expose a partof the semiconductor circuit 158, an aperture may be formed so as toinclude only a via-hole 160 or a via-hole 160 and a part of thesemiconductor circuit 158.

With the high integration of IC, solder bumps for signal lines onpackage substrates are required to become even smaller in diameter andnarrower in pitch. On the contrary, in order to support instantaneousincreases of consumption power of an IC chip, a solder bump for a powerline and earth line on a package substrate is not required to becomeextremely small in diameter. In other words, because the resistancevalue of solder bumps made of solder alloy increases with smallerdiameters, voltage drops when consumption power increasesinstantaneously and it causes malfunction of the IC chip. As acorresponding method for such contradicting requirements, it isdesirable to use a solder bump with two types of diameters in which asolder bump for signal lines is made smaller in diameter and a solderbump for power and earth is not made smaller in diameter.

As shown in FIG. 11, a large-diameter solder bump 78P for power andearth on the upper side of the multilayered printed wiring board 10 isjointed to an electrode 92P for power and earth of an IC chip 90, and asmall-diameter solder bump 78S for signals is joined to an electrode 92Sfor signals. On the other hand, a solder bump 78D on the lower side isjointed to a land 96 of a daughter board 94.

Continuously, with reference to FIG. 1 to FIG. 6, a method formanufacturing the abovementioned multilayered printed wiring board 10that was mentioned above with reference to FIG. 10 is explained.

(1) On both sides of an insulating substrate 30 that is made of glassepoxy resin or BT (bismaleimide triazine) resin with thicknesses rangingfrom 0.2 to 0.8 mm, a copper-clad lamination 30A on which 5 to 250 μm ofcopper foil 32 is laminated is made as the starting material (FIG. 1(A)). Firstly, this copper-clad lamination is drilled to make a hole 33(FIG. 1 (B)), and a lateral conductor layer 36 b of a through-hole 36 isformed through nonelectrolytic plating and electrolytic plating (FIG. 1(C)).

(2) After washing and drying the substrate 30 on which the through-hole36 is formed, blackening treatment is performed using a blackening bath(oxidizing bath) of aqueous solution containing NaOH (10 g/l), NaClO₂(40 g/l), and Na₃PO₄ (6 g/l), reduction treatment is performed with areduction bath of aqueous solution containing NaOH (10 g/l) and NaBH₄ (6g/l), and a rough surface 36α is formed on the lateral conductor layer36 b and the surface of the through-hole 36 (FIG. 1 (D)).

(3) Next, filler 37 (for example, nonconductive filling copper pastemanufactured by Tatsuta Electric Wire & Cable Co., Ltd., product name:DD PASTE) containing copper particles with an average particle diameterof 10 μm is filled into a through-hole 36 by screen printing beforebeing dried and hardened (FIG. 2 (A)). This is filled into athrough-hole by applying in a printing method on the substrate uponwhich a mask equipped with an aperture on the through-hole area isplaced, and afterwards it is dried and hardened.

Continuously, the filler 37 protruding from the through-hole 36 isremoved by a belt sander with #600 belt abrasive paper (for example,manufactured by Sankyo Rikagaku Co., Ltd.), and further abrased with apuff to remove scratches, caused by this belt sander abrasive, to makethe surface of the substrate 30 substantially flat (see FIG. 2 (B)). Inthis manner, a substrate 30 in which the lateral conductor layer 36 band the resin filler 37 of the through-hole 36 are closely andeffectively attached through the rough layer 36α is obtained.

(4) On the surface of the substrate 30 that was made substantially flatin the abovementioned (3), a palladium catalyst (for example,manufactured by Atotech Japan) is provided and treated with electrolesscopper plating to form an electroless copper plating film 23 with athickness of 0.6 μm (see FIG. 2 (C)).

(5) Subsequently, by performing electro-copper plating under thefollowing conditions, an electrol copper plating film 24 is formed witha thickness of 15 μm, to provide an area to be a lid-plated layer(through-hole land) to thicken the area to be a semiconductor circuit 34and cover the filler 37 that is filled in the through-hole 36 (FIG. 2(D)).

The aqueous solution for electrolytic plating includes:

-   -   Sulphuric acid=180 g/l;    -   Copper sulfate=80 g/l; and    -   Additive (manufactured by Atotech Japan, product name: Cupracid        GL)=1 ml/l.

Conditions for electrolytic plating include:

-   -   Current density=1 A/dm²;    -   Time=70 minutes; and    -   Temperature=Room temperature.

(6) On both sides of the substrate 30 to be a semiconductor circuit anda lid-plated layer, commercially available photosensitive dry film isattached, a mask is placed, and an etching resist 25 with a thickness of15 μm is formed by exposing at 100 mJ/cm², and processed to develop with0.8% sodium carbonate (see FIG. 2 (E)).

(7) Then, plated film 23, 24 and a copper foil 32 on which the etchingresist 25 is not formed is dissolved to remove with etching solutionthat is composed mostly of cupric chloride, and then the independentsemiconductor circuit 34 and the lid-plated layer 36 a to cover thefiller 37 are formed by delaminating to remove the etching resist 25with 5% KOH (see FIG. 3 (A)).

(8) Next, on the surface of the semiconductor circuit 34 and thelid-plated layer 36 a to cover the filler 37, a rough layer(concavo-convex layer) 34β with a thickness of 2.5 μm made of a Cu-Ni-Palloy is formed, and on the surface of this rough layer 34β, an Sn layerwith a thickness of 0.3 μm is formed (see FIG. 3 (B), provided, however,that an Sn layer is not shown).

(9) On both sides of the substrate, a resin film for an interlayer resininsulation layer (for example, manufactured by Ajinomoto Co., Inc.:product name: ABF-45SH) 50γ that is slightly larger than the substrateis placed on the substrate and cut, by temporarily bonding with pressureunder 0.45 Mpa of pressure at 80° C. for 10 seconds, and is furtherattached with a vacuum laminator device in the following method to forman interlayer resin insulation layer 50 (FIG. 3 (C)).

In other words, the resin film for the interlayer resin insulation layeris actually bonded with pressure on the substrate under a vacuum degreeof 67 Pa and 0.47 Mpa of pressure at 85° C. for 60 seconds andsubsequently hardened with heat at 170° C. for 40 minutes.

(10) Next, with a CO₂ gas laser with a wavelength of 10.4 μm, anaperture 51 for a via-hole is formed on an interlayer resin insulationlayer 50 (FIG. 3 (D)) under the following conditions: beam diameter of4.0 mm, top hat mode, pulse width of 3 to 30 μseconds, diameter ofthrough-hole on the mask of 1.0 to 5.0 mm, and with 1 to 3 shots.

(11) The substrate on which the aperture 51 for the via-hole is formedis soaked into solution containing 60 g/l permanganic acid at 80° C. for10 minutes, and a rough surface 50α is formed on the surface of theinterlayer resin insulation layer 50 including the inner wall of theaperture 51 for the via-hole by removing particles on the surface of theinterlayer resin insulation layer 50 (FIG. 4 (A)).

(12) Next, the substrate on which the abovementioned treatment iscompleted is washed with water after soaking into neutralizationsolution (for example, manufactured by Shipley Company L.L.C).

Furthermore, by providing a palladium catalyst on the surface of saidsubstrate on which roughening treatment (roughening depth 3 μm) isperformed, the nucleus of the catalyst is attached on the surface of theinterlayer resin insulation layer and the inner wall of the aperture forthe via-hole. In other words, the abovementioned substrate is soakedinto a catalyst solution containing palladium chloride (PbCl₂) andstannous chloride (SnCl₂) and the catalyst is provided by precipitatingpalladium metal.

(13) Next, the substrate provided with the catalyst is soaked into anaqueous solution for electroless copper plating (for example, THRU-CUPPEA, manufactured by Uyemura & Co., Ltd.), an electroless copper platingfilm with a thickness of 0.3 to 3.0 μm is formed throughout the roughsurface, and a substrate on which the electroless copper plating film 52is formed on the surface of the interlayer resin insulation layer 50including the inner wall of aperture 51 for the via-hole is obtained(FIG. 4 (B)). Conditions for nonelectrolytic plating are at 34° C.solution temperature for 45 minutes.

(14) On the substrate on which an electroless copper plating film 52 isformed, a commercially available photosensitive dry film is attached, amask is placed, and a plated resist 54 with a thickness of 25 μm ismounted by exposing at 110 mJ/cm² and treating to develop in an 0.8%sodium carbonateaqueous solution. Subsequently, the substrate is washedwith water at 50° C. to degrease, washed with water at 25° C., furtherwashed with sulphuric acid, and an electrol copper plating film 56 witha thickness of 15 μm is formed on the area in which the plated resist 54is not formed by performing electrolytic plating under the followingconditions (FIG. 4 (C)).

The solution for electrolytic plating includes:

-   -   Sulphuric acid=2.24 mol/l;    -   Copper sulfate=0.26 mol/l; and    -   Additive=19.5 ml/l (for example, manufactured by Atotech Japan,        Cupracid GL).

The conditions for electrolytic plating include

-   -   Current density=1 A/dm²;    -   Time=70 minutes; and    -   Temperature=22±2° C.

(15) Furthermore, after delaminating to remove the plated resist 54 with5% KOH, the nonelectrolytic plating film under the plated resist isdissolved to remove by etching with a mixture of sulphuric acid andhydrogen peroxide to make an independent semiconductor circuit 58 and avia-hole 60 (FIG. 4 (D)).

(16) Subsequently, by performing a similar treatment as theabovementioned (4), on the surface of the semiconductor circuit 58 andthe via-hole 60, a rough surface 58α is formed. The thickness of thelower layer semiconductor circuit 58 is 15 μm (FIG. 5 (A)). However, thethickness of the lower layer semiconductor circuit may be formed between5 to 25 μm.

(17) By repeating the abovementioned processes from (9) to (16), afurther interlayer insulating layer 150 having an upper layersemiconductor circuit 158 and a via-hole 160 is formed and amultilayered wiring board is obtained (FIG. 5 (B)).

(18) Next, after a commercially available solder mask composition 70 isapplied with a thickness of 20 μm on both sides of the multilayeredwiring substrate and dried under 70° C. for 20 minutes and at 70° C. for30 minutes, a photomask with a thickness of 5 mm on which the pattern ofthe solder mask aperture area is drawn is closely attached to thesolder-mask layer 70, exposed to ultraviolet rays at 1,000 mJ/cm², andtreated to develop in the DMTG solution, a large-diameter (D1=105 μm)aperture 71P and a small-diameter (D2=80 μm) aperture 71S are formed onthe upper surface and an aperture 71 with diameter of 200 μm is formedon the lower surface (FIG. 5 (C)).

Then, it is further heated under 80° C. for one hour, at 100° C. for onehour, at 120° C. for one hour, and at 150° C. for 3 hours to harden thesolder-mask layer, and a solder mask pattern layer with a thicknessbetween 15 to 25 μm having an aperture is formed.

(19) Next, the substrate on which the solder-mask layer 70 is formed issoaked into electroless nickel solution at pH=4.5 containing nickelchloride (2.3×10⁻¹ mol/l), sodium hypophosphite (2.8×10⁻¹ mol/l), andsodium citrate (1.6×10⁻¹ mol/l) for 20 minutes, and a nickel-platedlayer 72 with a thickness of 5 μm is formed on aperture areas 71, 71S,and 71P. Furthermore, the substrate is soaked into electrolessgold-plating solution containing gold potassium cyanide (7.6×10⁻³mol/l), ammonium chloride (1.9×10⁻¹ mol/l), sodium citrate (1.2×10⁻¹mol/l), and sodium hypophosphite (1.7×10⁻¹ mol/l) at 80° C. for 7.5minutes, and a gold-plated layer 74 with a thickness of 0.03 μm isformed on the nickel-plated layer 72 to form a conductive pad on theboard (FIG. 5 (D)). Other than the nickel-gold layer, a single layer oftin or noble metal layers (gold, silver, palladium, platinum, etc.) maybe formed. Further, a conductive pad may be formed without adding metallayers.

(20) A mask for print 17 having an aperture 17 a that corresponds tolarge-diameter aperture 71P is positioned on the multilayered printedwiring board 10, and a solder paste 75 is printed in the large-diameteraperture 71P (FIG. 6 (A)).

(21) By reflowing at 200° C., the solder paste 75 is converted to asolder body 75C (FIG. 6 (B)).

(22) After washing to reflow, flux 82 is applied to the surface of thesolder-resist layer (FIG. 6(C)).

(23) A process to mount a solder ball.

Continuously, with reference to FIG. 7 to FIG. 9, a process to mount asolder ball on the multilayered printed wiring board 10 with the devicefor mounting a solder ball 100 mentioned above with reference to FIG. 14is explained.

(I) Recognition and Correction of Position for a Multilayered PrintedWiring Board.

As shown in FIG. 7 (A), an alignment mark 34M for the multilayeredprinted wiring board 10 is recognized with an alignment camera 146 andthe position of the multilayered printed wiring board 10 is correctedwith an XYθ suction table 114 against a small-diameter mask for aligninga ball 16. In other words, each aperture 16 a of the small-diameter maskfor aligning a ball 16 is positioned so as to correspond to thesmall-diameter aperture 71S of the multilayered printed wiring board 10.

(II) Feeding of Solder Balls.

As shown in FIG. 7 (B), solder balls 77 (diameter 75 μm, Sn63Pb37(manufactured by Hitachi Metals, Ltd., for example)) are fed with thespecified quantity to the mount cylinder 124 from a feeding device forsolder balls 122. In addition, it may be pre-fed in the mount cylinder.Although Sn/Pb solder is used for solder balls in the exampleembodiments, it may be a Pb-free solder with Sn and any optionallyselected from Ag, Cu, In, Bi, or Zn, etc.

(III) Mounting of Solder Balls.

As shown in FIG. 8 (A), by positioning the mount cylinder 124 on theupper part of the small-diameter mask for aligning a ball 16 whileholding the prescribed clearance (for example, 0.5 to 4 times the balldiameter) with said mask for aligning the ball and intaking air from thesuction area 124 b, the flow rate in the gap between the mount cylinderand the printed wiring board is made between 5 m/sec to 35 m/sec andsolder balls 77 are aggregated on the small-diameter mask for aligningthe ball 16 immediately below the aperture area 124A of said mountcylinder 124.

Subsequently, as shown in FIG. 8 (B) and FIG. 9 (A), the mount cylinder124 aligned along the axis of the multilayered printed wiring board 10in FIG. 14 (B) and FIG. 14 (A) is sent horizontally along to the X-axisthrough a moving axis in an X direction 140. In such manner, solderballs 77 aggregated on the small-diameter mask for aligning a ball 16are moved as the mount cylinder 124 moves, and the solder balls 77 aredropped into the small-diameter aperture 71S of the multilayered printedwiring board 10 through the aperture 16 a of the small-diameter mask foraligning the ball 16 to mount. In such manner, the solder balls 77 arealigned sequentially on all the joint pads of the multilayered printedwiring board 10. In another embodiment, the mount cylinder 124 may beheld fixed while the board 10 and mask 16 are moved relative to thecylinder 124.

(IV) Removal of absorbed solder balls.

As shown in FIG. 9 (B), after the redundant solder balls 77 are guidedto a position where there is no aperture 16 a on the small-diameter maskfor aligning the ball 16 with the mount cylinder 124, the solder balls77 are sucked up and removed by the cylinder for removing absorbed balls161.

(24) Subsequently, by reflowing at 230° C., the solder body 75 on theupper surface and the solder ball 77 are melted, and a large-diametersolder bump 78P is formed from the solder body 75 and the solder ball77, a small-diameter solder bump 78S is formed from the solder ball 77,and a solder bump 78D is formed from a solder body on the lower surfacethat is not shown in the figure (FIG. 10).

By placing an IC chip 90 on the multilayered printed wiring board 10 andreflowing, a joint pad of the printed wiring board and an electrode ofthe IC chip 90 are jointed through the solder bump 78P and 78S. Then, itis mounted on a daughter board 94 through the solder bump 78D (FIG. 11).

According to an embodiment of the invention, where a small-diameter bump78S is formed from the small-diameter solder ball 77 mounted on thesmall-diameter aperture 71S of the solder-mask layer 70 and alarge-diameter bump 78P is formed from the large-diameter solder ball 77mounted on the large-diameter aperture 71P, the small-diameter bump 78Sand the large-diameter bump 78P with different diameters can be formedat approximately same height. Consequently, when mounting the IC chip 90through the small-diameter bump 78S and the large-diameter bump 78P, itis possible to improve the mounting yield of the IC chip 90. Also, it ispossible to secure joint reliability between the IC chip 90 and themultilayered printed wiring board 10.

Also according to an embodiment of the invention, after the solder body75C is formed from the solder paste by reflowing, a mask for aligningthe ball 16 is used. Because the solder body 75C is not mispositionedeven if the mask for aligning the ball 16 comes into contact with thesolder body 75C, the mask for aligning the ball 16 can be positionedproximately to the solder-resist layer 70 and the solder ball 77 can bemounted on the large-diameter aperture 71P and small-diameter aperture71S appropriately, resulting in avoiding mispositioning or missing alarge-diameter bump 78P or a small-diameter bump 78S.

Additionally, according to an embodiment, the mount cylinder 124 ispositioned on the upper side of the small-diameter mask for aligning aball 16, solder balls 77 are aggregated by intaking air from said mountcylinder 124, the aggregated solder balls 77 are moved on the mask foraligning a ball 16 by moving the mount cylinder 124 horizontally, andthe solder balls 77 are dropped into the small-diameter aperture 71S andlarge-diameter aperture 71P of the multilayered printed wiring board 10through the aperture 16 a of the mask for aligning the ball 16.Consequently, the fine solder balls 77 can be securely mounted on all(or essentially all) of the small-diameter apertures 71S andlarge-diameter apertures 71P of the multilayered printed wiring board10. Additionally, when the solder balls 77 are moved without contacting,unlike in cases involving the use of a squeegee, the solder ball can bemounted on the small-diameter aperture 71S without damaging the solderballs and the height of the solder bump 78S can be made uniform.Furthermore, when the solder balls are guided by a intaking force, itcan prevent the solder balls from aggregating and absorbing.

With reference to FIG. 12, a method for manufacturing a printed wiringboard according to another embodiment of the present invention isexplained. In the previously described embodiments, small-diametersolder balls 77M and large-diameter solder balls 77L are simultaneouslyreflowed. On the contrary, in the embodiment of FIG. 12, firstlysmall-diameter solder balls 77M are reflowed and then large-diametersolder balls 77L are mounted on the multilayered printed wiring board toreflow the large-diameter solder balls 77L.

Similar to the embodiment mentioned above with reference to FIG. 6 (A),after printing a solder paste 75 on the small-diameter aperture 71S ofthe multilayered printed wiring board 10, flux 82 is applied to thesolder-resist layer 70 (FIG. 12(A)). By using a mount cylinder 124 ofthe device for mounting a solder ball 100 and a mask for aligning theball 16, solder balls 77 are dropped into the small-diameter aperture71S and large-diameter aperture 71P on the multilayered printed wiringboard 10 (FIG. 12(B)). Subsequently, by reflowing at 230 ° C., solderbumps 78P and 78S are formed from the solder ball 77 in thesmall-diameter aperture 71S, the solder paste 75 in the large-diameteraperture 71P, and the solder balls 77 (FIG. 10). In this embodiment,reducing the number of reflows can prevent decreases in reliabilitycaused by thermal history.

With reference to FIG. 13, a method for manufacturing a printed wiringboard according to another embodiment of the present invention isexplained. In this embodiment, similar to the embodiment of FIG. 12,solder paste 75 and solder ball 77 are reflowed simultaneously.

Similar to the embodiment mentioned above with reference to FIG. 5 (D),after completing the multilayered printed wiring board, flux ispreliminary applied to the solder-resist layer 70 (FIG. 13 (A)). Byusing a mask 17 for printing, a solder paste 75 is printed on thelarge-diameter aperture 71P of the multilayered printed wiring board 10(FIG. 13 (B)). Further, by using a mount cylinder 124 of the device formounting a solder ball 100 and a mask for aligning the ball 16, solderballs 77 are dropped into the small-diameter aperture 71S andlarge-diameter aperture 71P on the multilayered printed wiring board 10(FIG. 13(C)). Subsequently, by reflowing at 230° C., solder bumps 78Pand 78S are formed from the solder ball 77 in the small-diameteraperture 71S, the solder paste 75 in the large-diameter aperture 71P,and the solder balls 77 (FIG. 10).

In the embodiment of FIG. 13, reducing the number of reflows can preventdecreases in reliability caused by thermal history. Although a mountcylinder is moved when mounting a solder ball in the abovementionedembodiments, a mask and a printed wiring board may be moved or both maybe moved relative to one another.

1. A method for manufacturing a printed wiring board having a bump,comprising: forming a solder-resist layer having a small-diameteraperture and a large-diameter aperture, each aperture exposing arespective conductive pad of the printed wiring board; printing a solderpaste in the large-diameter aperture in the solder-resist layer, but notprinting the solder paste in the small-diameter aperture in the solderresist layer; loading a solder ball in each of the large-diameteraperture and the small-diameter aperture using a mask having apertureareas that correspond to the small-diameter aperture and large-diameteraperture of the solder-resist layer; forming a small-diameter bump fromthe solder ball in the small-diameter aperture; and forming alarge-diameter bump from both the solder paste and the solder ball inthe large-diameter aperture, wherein the loading a solder ballcomprises: positioning a cylinder member having an aperture area thatfaces an upper side of the mask; aggregating the solder balls on themask immediately below the cylinder member by inrushing air to theaperture area of the cylinder member; and loading the aggregated solderballs in the small-diameter aperture and the large-diameter aperture inthe solder-resist layer through the aperture areas of the mask by movingthe cylinder member relative to the mask.
 2. A method for manufacturinga printed wiring board having a bump, comprising: forming asolder-resist layer having a small-diameter aperture and alarge-diameter aperture, each aperture exposing a respective conductivepad of the printed wiring board; printing a solder paste in thelarge-diameter aperture in the solder-resist layer, but not printing thesolder paste in the small-diameter aperture in the solder resist layer;loading a solder ball in each of the large-diameter aperture and thesmall-diameter aperture using a mask having aperture areas thatcorrespond to the small-diameter aperture and large-diameter aperture ofthe solder-resist layer; forming a small-diameter bump from the solderball in the small-diameter aperture; and forming a large-diameter bumpfrom both the solder paste and the solder ball in the large-diameteraperture, wherein the loading a solder ball comprises: positioning acylinder member having an aperture area that faces an upper side of themask; aggregating the solder balls on the mask immediately below thecylinder member by inrushing air to the aperture area of the cylindermember; and loading the aggregated solder balls in the small-diameteraperture and the large-diameter aperture in the solder-resist layerthrough the aperture areas of the mask by moving the cylinder memberrelative to the mask.
 3. A method for manufacturing a printed wiringboard having a bump, comprising: forming a solder-resist layer having asmall-diameter aperture and a large-diameter aperture, each apertureexposing a respective conductive pad of the printed wiring board;printing a solder paste in the large-diameter aperture in thesolder-resist layer, but not printing the solder paste in thesmall-diameter aperture in the solder resist layer; loading a solderball in each of the large-diameter aperture and the small-diameteraperture using a mask having aperture areas that correspond to thesmall-diameter aperture and large-diameter aperture of the solder-resistlayer; forming a small-diameter bump from the solder ball in thesmall-diameter aperture; forming a large-diameter bump from both thesolder paste and the solder ball in the large-diameter aperture; andapplying a flux to the small diameter aperture before mounting thesolder ball therein; wherein the loading a solder ball comprises:positioning a cylinder member having an aperture area that faces anupper side of the mask, aggregating the solder balls on the maskimmediately below the cylinder member by inrushing air to the aperturearea of the cylinder member; and loading the aggregated solder balls inthe small-diameter aperture and the large-diameter aperture in thesolder-resist layer through the aperture areas of the mask by moving thecylinder member relative to the mask.
 4. The manufacturing method for aprinted wiring board according to claim 1, comprising: removingredundant solder balls, that are not aligned in an aperture of the mask,from the mask by suction.
 5. A method for manufacturing a printed wiringboard having a bump, comprising: forming a solder-resist layer having asmall-diameter aperture and a large-diameter aperture, each apertureexposing a respective conductive pad of the printed wiring board;printing a solder paste in the large-diameter aperture in thesolder-resist layer, but not printing the solder paste in thesmall-diameter aperture in the solder resist layer; loading a solderball in each of the large-diameter aperture and the small-diameteraperture using a mask having aperture areas that correspond to thesmall-diameter aperture and large-diameter aperture of the solder-resistlayer; forming a small-diameter bump from the solder ball in thesmall-diameter aperture; forming a large-diameter bump from both thesolder paste and the solder ball in the large-diameter aperture; andapplying a flux to the small diameter aperture before mounting thesolder ball therein, wherein the loading a solder ball comprises:positioning a cylinder member having an aperture area that faces anupper side of the mask, aggregating the solder balls on the maskimmediately below the cylinder member by inrushing air to the aperturearea of the cylinder member; and loading the aggregated solder balls inthe small-diameter aperture and the large-diameter aperture in thesolder-resist layer through the aperture areas of the mask by moving themask and printed wiring board relative to the cylinder member.